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Precursor
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Fluorine/Krypton/Neon/Xenon/Argon/Nitrogen Mixture
F2/Kr/Ne/Xe/Ar/N2
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Silane/Nitrogen/Helium/Argon/Hydrogen Mixture
SiH4/N2/He/Ar/H2
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Carbon Dioxide/Oxygen/Nitrogen Mixture
CO2/O2/N2
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Argon/Nitrogen Mixture
Ar/N2
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Methane/Argon Mixture
CH4/Ar
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Ethylene Oxide
EO/CO2
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