Global
Chinese
Product Specifications
Purity:99.999%
Packaging Specifications
Cylinder specification: 47L
Valve Type: DISS634/CGA660
Filling Level: 50KG
Product Application

Used for diffusion, doping, dry etching and other processes in silicon semiconductor devices and integrated circuits for the electronics industry.

Physical and chemical indicators
Molecular weight:
117
Molecular formula:
BCl3
Melting point:
- 107℃
Boiling point:
12.5℃
Relative density (air=1):
4.5
Solubility in water:
NA
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