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Product Application
Mainly used for cleaning of chemical vapor deposition (CVD) devices, etching gas for plasma processes.
Physical and chemical indicators
- Molecular weight:
- 71
- Molecular formula:
- NF3
- Melting point:
- - 207℃
- Boiling point:
- - 129℃
- Relative density (air=1):
- 2.45
- Solubility in water:
- Insoluble
- Hotline
- 0599-8333575
- Email：sale@fudoumat.com
- 网址：www.fudoumat.com
- 地址：福建省邵武市吴家塘镇金沙大道19号
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Min ICP 2022012727-1