Global
Chinese
Product Specifications
Purity:99.999%-99.9999%
Packaging Specifications
Cylinder Specification: 47L
Valve Type : DISS716/CGA580
Filling Level : 50KG
Product Application

In semiconductor manufacturing, sulfur hexafluoride is used as an etching gas in fine micromachining processes.

Physical and chemical indicators
Molecular weight:
146
Molecular formula:
SF6
Melting point:
- 64℃
Boiling point:
-50℃
Relative density (air=1):
5.11
Solubility in water:
Slightly soluble in water
Hotline
0599-8333575
  • Email:sale@fudoumat.com
  • 网址:www.fudoumat.com
  • 地址:福建省邵武市吴家塘镇金沙大道19号

Please submit your message online and we will contact you as soon as possible!

Name:
Phone:
Email:
Message: