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Product Application
Used for ion etching of silicon layers in semiconductor chip manufacturing, widely used in advanced processes up to 14nm and 7nm.
Physical and chemical indicators
- Molecular weight:
- 52
- Molecular formula:
- CH2F2
- Melting point:
- - 51.6℃
- Boiling point:
- -136℃
- Relative density (air=1):
- Solubility in water:
- Insoluble
- Hotline
- 0599-8333575
- Email：sale@fudoumat.com
- 网址：www.fudoumat.com
- 地址：福建省邵武市吴家塘镇金沙大道19号
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Min ICP 2022012727-1