Global
Chinese
Product Specifications
Purity:99.99%
Packaging Specifications
Cylinder Specification : 47L
Valve Type : DISS724/CGA350
Filling Level : 10KG/16KG
Product Application

Used as an etching gas for nitride films in the semiconductor industry.

Physical and chemical indicators
Molecular weight:
34
Molecular formula:
CH3F
Melting point:
- 115℃
Boiling point:
-79℃
Relative density (air=1):
1.2
Solubility in water:
NA
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