Product Chinese Name: Ethylborane

English name of product: diborane

CAS number: 19287-45-7

Product introduction: Ethyborane is a inorganic compound with chemical formula of B2H6. It is highly toxic and colorless gas at normal temperature. It is used as high-energy fuel for rockets and missiles and also for organic synthesis. Ethyborane is a p-type doping source used as silicon material in semiconductor manufacturing. It is widely used in semiconductor industry, and is used in semiconductor production, epitaxial growth, passivation, diffusion and ion implantation of silicon and germanium, With the improvement of large-scale integrated circuit integration, the requirements for B2H6 purity are also increasing.